Dielectric Properties of Pulsed Laser Deposited SrTiO<sub>3</sub> Thin Films

A. M. Clark; Jianhua Hao; Weidong Si; X. X. Xi

doi:10.1557/proc-541-77

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Dielectric Properties of Pulsed Laser Deposited SrTiO₃ Thin Films

A. M. Clark Jianhua Hao Weidong Si X. X. Xi

Year: 1998 Journal: MRS Proceedings Vol: 541 Publisher: Cambridge University Press

DOI: 10.1557/proc-541-77

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Keywords:

Materials science Dielectric Dissipation factor Thin film Dielectric loss Electrode Condensed matter physics Phase (matter) Laser Pulsed laser deposition Optoelectronics Optics Nanotechnology

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Semiconductor materials and devices

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Dielectric Properties of Pulsed Laser Deposited SrTiO₃ Thin Films

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