Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor

Fabrice Duval; Stephen Wilson; G J Ensell; Nicolas Evanno; Markys G. Cain; R. W. Whatmore

doi:10.1016/j.sna.2006.03.035

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Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor

Fabrice Duval Stephen Wilson G J Ensell Nicolas Evanno Markys G. Cain R. W. Whatmore

Year: 2006 Journal: Sensors and Actuators A Physical Vol: 133 (1)Pages: 35-44 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2006.03.035

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Keywords:

Materials science Piezoelectricity Laser Doppler vibrometer Cantilever Piezoresistive effect Piezoelectric coefficient Displacement (psychology) Silicon Voltage Composite material Piezoelectric accelerometer Actuator Elastic modulus Modulus Microelectromechanical systems Optoelectronics Electrical engineering

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Ferroelectric and Piezoelectric Materials

Physical Sciences → Materials Science → Materials Chemistry

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor

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