BOOK-CHAPTER

Micro/Nanorobotic Manufacturing of Thin-Film NEMS Force Sensor

Keywords:
Materials science Piezoresistive effect Scanning electron microscope Nanotechnology Shadow mask Electrode Pipette Cantilever Fabrication Optoelectronics Composite material Optics

Metrics

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Cited By
0.00
FWCI (Field Weighted Citation Impact)
35
Refs
0.07
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Force Microscopy Techniques and Applications
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Nanowire Synthesis and Applications
Physical Sciences →  Engineering →  Biomedical Engineering

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