Micro/Nanorobotic Manufacturing of Thin-Film NEMS Force Sensor

Gilgueng Hwang; Hideki Hashimoto

doi:10.1007/978-1-4614-6684-0_11

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Micro/Nanorobotic Manufacturing of Thin-Film NEMS Force Sensor

Gilgueng Hwang Hideki Hashimoto

Year: 2013 Pages: 229-249

DOI: 10.1007/978-1-4614-6684-0_11

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Keywords:

Materials science Piezoresistive effect Scanning electron microscope Nanotechnology Shadow mask Electrode Pipette Cantilever Fabrication Optoelectronics Composite material Optics

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Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Nanowire Synthesis and Applications

Physical Sciences → Engineering → Biomedical Engineering

Micro/Nanorobotic Manufacturing of Thin-Film NEMS Force Sensor

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