JOURNAL ARTICLE
RF MEMS tunable inductor
Abstract
This paper reports a single-wafer micromachined radio-frequency (RF) inductor that can be integrated in a conventional RFIC device. The inductor achieved a quality factor greater than 9 at 5 GHz and a self-resonance frequency well above 15 GHz. The inductor is tunable and the inductance variation is greater than 8%.
Keywords:
Inductor RFIC Inductance Radio frequency Q factor Microelectromechanical systems Materials science Electrical engineering Wafer Quality (philosophy) Optoelectronics Surface micromachining Engineering Physics Voltage Medicine Resonator
Metrics
13
Cited By
1.48
FWCI (Field Weighted Citation Impact)
10
Refs
0.84
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Radio Frequency Integrated Circuit Design
Physical Sciences → Engineering → Electrical and Electronic Engineering
Microwave Engineering and Waveguides
Physical Sciences → Engineering → Electrical and Electronic Engineering
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