JOURNAL ARTICLE
A Tunable RF MEMS Inductor
Abstract
This paper reports a single-wafer micromachined radio-frequency (RF) inductor that can be integrated in a convetional RFIC device. The Inductor achieved a quality factor greater than 9 at 15 GHz and a self-resonance frequency well above 15 GHz. The inductor is tunable and the inductance variation is greater than 8%.
Keywords:
Inductor RFIC Inductance Radio frequency Q factor Microelectromechanical systems Materials science Electrical engineering Quality (philosophy) Optoelectronics Wafer Engineering Physics Voltage Resonator
Metrics
11
Cited By
1.34
FWCI (Field Weighted Citation Impact)
9
Refs
0.81
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Radio Frequency Integrated Circuit Design
Physical Sciences → Engineering → Electrical and Electronic Engineering
3D IC and TSV technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
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