Impact of silicon nitride thickness on the infrared sensitivity of silicon nitride–aluminum microcantilevers

JOURNAL ARTICLE

Year: 2012 Journal: Sensors and Actuators A Physical Vol: 185 Pages: 17-23 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2012.07.006

Keywords:

Cantilever Materials science Silicon nitride Nitride Silicon Optoelectronics Aluminium Composite material Optics Layer (electronics) Physics

Metrics

Cited By

0.72

FWCI (Field Weighted Citation Impact)

Refs

0.74

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering