Bio-functionalization of silicon nitride-based piezo-resistive microcantilevers

Nitin S. Kale; Manoj D. Joshi; P. N. Rao; Soumyo Mukherji; V. Ramgopal Rao

doi:10.1007/s12046-009-0036-7

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Bio-functionalization of silicon nitride-based piezo-resistive microcantilevers

Nitin S. Kale Manoj D. Joshi P. N. Rao Soumyo Mukherji V. Ramgopal Rao

Year: 2009 Journal: Sadhana Vol: 34 (4)Pages: 591-597 Publisher: Springer Science+Business Media

DOI: 10.1007/s12046-009-0036-7

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Keywords:

Surface modification Materials science Silicon nitride Resistive touchscreen Nanotechnology Nitride Silicon oxynitride Silicon Cantilever Plasma Optoelectronics Chemical engineering Computer science Composite material Layer (electronics) Engineering

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Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Analytical Chemistry and Sensors

Physical Sciences → Chemical Engineering → Bioengineering

Bio-functionalization of silicon nitride-based piezo-resistive microcantilevers

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