Pyroelectric infrared sensors made of La-modified PbTiO₃ thin films and their applications

Abstract

Abstract High sensitive pyroelectric infrared (IR) sensors have been fabricated by using c-axis oriented La-modified PbTiO3 (Pb1–xLaxTi1−x/4O3, PLT) thin films. The PLT thin films were deposited on (100)-cleaved MgO single crystal substrates by intermittent rf-magnetron sputtering method. The PLT thin films have high figures of merit for IR sensor without a poling treatment. High performance pyroelectric IR sensors (single element type and linear array type) were fabricated by using PLT (x=0·1, γ=5·5x10−8 C/cm2K, ϵr=200) thin films. The sensors have remarkably high D* of 3–6x108 cmHz1/2/W and very fast response. A new compact IR sensing system using the linear array sensor (8 elements) has been developed for a new type of room air-conditioner. This system can measure thermal distribution (8x64) by horizontal scanning of the vertical linear array. Image processing with neural network concept makes possible high-accuracy using a few data from the sensor elements. This sensing system provides ‘‘smart airconditioning'’to improve the comfortable control.