Grating fabrication through x-ray lithography

Pantazis Mouroulis; Frank T. Hartley; Richard E. Muller; Daniel W. Wilson; Aidan Shori; Martin Feldman; Li Jiang; Todd R. Christenson

doi:10.1117/12.503200

JOURNAL ARTICLE

Grating fabrication through x-ray lithography

Pantazis Mouroulis Frank T. Hartley Richard E. Muller Daniel W. Wilson Aidan Shori Martin Feldman Li Jiang Todd R. Christenson

Year: 2003 Journal: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Vol: 5173 Pages: 108-108 Publisher: SPIE

DOI: 10.1117/12.503200

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Abstract

Blazed gratings have been fabricated using gray-scale X-ray lithography. The gratings have high efficiency, low parasitic light, and high groove quality. They can be generated over a considerable depth for use anywhere in the ultraviolet to middle infrared range. They can also be recorded on substrates of considerable curvature.

Keywords:

Lithography Grating Materials science Optics X-ray lithography Fabrication Optoelectronics Diffraction grating Photolithography Next-generation lithography Electron-beam lithography Resist Nanotechnology Physics

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Optical Coatings and Gratings

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Thermal Radiation and Cooling Technologies

Physical Sciences → Engineering → Civil and Structural Engineering

Grating fabrication through x-ray lithography

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