Fabrication of X-ray Grating Using X-ray Lithography Technique

Abstract

X-ray radiographic imaging technique is very important in medical, biological, inspection, material science, and so on. However, it is not enough to obtain clear X-ray images of samples with low absorbance materials, such as biological soft tissues. Then, we have used an X-ray phase imaging method of an X-ray Talbot interferometer. In this method, X-ray gratings were required to have narrow pitch and high aspect ratio structure. Therefore, we have developed and fabricated high aspect ratio X-ray gratings with a pitch of 5.3 um, a height of 30 um, and a large effective area of 100 mm × 100 mm using X-ray lithography and narrow electroforming technique. In this paper, we discuss the fabrication process of X-ray gratings and results of X-ray phase tomography using an X-ray Talbot interferometer with these X-ray gratings.