JOURNAL ARTICLE
Microstructuring of silicon by electro-discharge machining (EDM) — part I: theory
Dominiek ReynaertsPaul-Henri 's HeerenHendrik Van Brussel
Year: 1997 Journal: Sensors and Actuators A Physical Vol: 60 (1-3)Pages: 212-218 Publisher: Elsevier BV
Keywords:
Surface micromachining Machining Electrical discharge machining Materials science Silicon Etching (microfabrication) Lithography Microelectromechanical systems Nanotechnology Mechanical engineering Engineering physics Optoelectronics Engineering Metallurgy Fabrication
Metrics
100
Cited By
4.10
FWCI (Field Weighted Citation Impact)
15
Refs
0.95
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced Machining and Optimization Techniques
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced machining processes and optimization
Physical Sciences → Engineering → Mechanical Engineering
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
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