Microstructing of silicon by electro-discharge machining (EDM) — part II: applications

Paul-Henri's Heeren; Dominiek Reynaerts; Hendrik Van Brussel; C. Beuret; Olle Larsson; A. Bertholds

doi:10.1016/s0924-4247(97)80293-2

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Microstructing of silicon by electro-discharge machining (EDM) — part II: applications

Paul-Henri's Heeren Dominiek Reynaerts Hendrik Van Brussel C. Beuret Olle Larsson A. Bertholds

Year: 1997 Journal: Sensors and Actuators A Physical Vol: 61 (1-3)Pages: 379-386 Publisher: Elsevier BV

DOI: 10.1016/s0924-4247(97)80293-2

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Keywords:

Electrical discharge machining Machining Rapid prototyping Mechanical engineering Machine tool Materials science Etching (microfabrication) Electrode Acceleration Computer science Engineering Nanotechnology Physics

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Advanced Machining and Optimization Techniques

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Advanced machining processes and optimization

Physical Sciences → Engineering → Mechanical Engineering

Microstructing of silicon by electro-discharge machining (EDM) — part II: applications

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Citation History

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