Study of an atmospheric pressure glow discharge (APG) for thin film deposition

Rüdiger Foest; F. Adler; F. Sigeneger; Martin Schmidt

doi:10.1016/s0257-8972(02)00487-5

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Study of an atmospheric pressure glow discharge (APG) for thin film deposition

Rüdiger Foest F. Adler F. Sigeneger Martin Schmidt

Year: 2002 Journal: Surface and Coatings Technology Vol: 163-164 Pages: 323-330 Publisher: Elsevier BV

DOI: 10.1016/s0257-8972(02)00487-5

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Keywords:

Materials science Thin film Hexamethyldisiloxane Analytical Chemistry (journal) X-ray photoelectron spectroscopy Dielectric barrier discharge Atmospheric pressure Dielectric Plasma Optoelectronics Nanotechnology Chemistry

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Plasma Applications and Diagnostics

Health Sciences → Medicine → Radiology, Nuclear Medicine and Imaging

Plasma Diagnostics and Applications

Physical Sciences → Engineering → Electrical and Electronic Engineering

Electrohydrodynamics and Fluid Dynamics

Physical Sciences → Engineering → Electrical and Electronic Engineering

Study of an atmospheric pressure glow discharge (APG) for thin film deposition

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