JOURNAL ARTICLE
An IC-compatible polyimide pressure sensor with capacitive readout
Michael PedersenM.G.H. MeijerinkWouter OlthuisP. Bergveld
Year: 1997 Journal: Sensors and Actuators A Physical Vol: 63 (3)Pages: 163-168 Publisher: Elsevier BV
Keywords:
Polyimide Capacitive sensing Materials science Optoelectronics Pressure sensor Electrical engineering Electronic engineering Composite material Engineering Mechanical engineering
Metrics
18
Cited By
1.37
FWCI (Field Weighted Citation Impact)
15
Refs
0.83
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Sensor Technology and Measurement Systems
Physical Sciences → Computer Science → Computer Networks and Communications
Related Documents
JOURNAL ARTICLE
Design and manufacturing of a pressure sensor with capacitive readout, CMOS compatible
Bogdan FîrtatOana NedelcuCarmen MoldovanD. Dascǎlu
Year: 2002 Pages: 553-556
JOURNAL ARTICLE
A capacitive differential pressure sensor with polyimide diaphragm
Michael PedersenM.G.H. MeijerinkWouter OlthuisP. Bergveld
Journal: Journal of Micromechanics and Microengineering Year: 1997 Vol: 7 (3)Pages: 250-252
JOURNAL ARTICLE
Smooth Contact Mode Capacitive Pressure Sensor with Polyimide Diaphragm
Jeahyeong HanJunghoon YeomJung‐Hyun LeeMark A. ShannonRichard I. Masel
Year: 2007 Vol: 14 Pages: 1468-1471
BOOK-CHAPTER
CMOS Compatible Capacitive Pressure Sensor with Read-Out Electronics
M. KandlerJ. EichholzYiannos ManoliW. Mokwa
Year: 1990 Pages: 574-580
JOURNAL ARTICLE
A MEMS capacitive pressure sensor compatible with CMOS process
Huiyang YuMing QinJianqiu HuangQing‐An Huang
Year: 2012 Pages: 1-4