Spin coated titanium–ruthenium oxide thin films

Christine Hummelgård; John Gustavsson; Ann Cornell; Håkan Olin; Joakim Bäckström

doi:10.1016/j.tsf.2013.03.044

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Spin coated titanium–ruthenium oxide thin films

Christine Hummelgård John Gustavsson Ann Cornell Håkan Olin Joakim Bäckström

Year: 2013 Journal: Thin Solid Films Vol: 536 Pages: 74-80 Publisher: Elsevier BV

DOI: 10.1016/j.tsf.2013.03.044

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Keywords:

Ruthenium Thin film Ruthenium oxide Materials science Titanium Oxide Titanium oxide Spin coating Spin (aerodynamics) Chemical engineering Nanotechnology Chemistry Metallurgy Physics Catalysis Organic chemistry

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Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Transition Metal Oxide Nanomaterials

Physical Sciences → Materials Science → Polymers and Plastics

Electronic and Structural Properties of Oxides

Physical Sciences → Materials Science → Materials Chemistry

Spin coated titanium–ruthenium oxide thin films

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