ZnO films deposited on GaAs substrates with a SiO2 thin buffer layer

Hong Koo Kim; Michelle Mathur

doi:10.1007/bf02661376

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ZnO films deposited on GaAs substrates with a SiO2 thin buffer layer

Hong Koo Kim Michelle Mathur

Year: 1993 Journal: Journal of Electronic Materials Vol: 22 (3)Pages: 267-273 Publisher: Springer Science+Business Media

DOI: 10.1007/bf02661376

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Keywords:

Materials science Ohmic contact Thin film Scanning electron microscope Electrical resistivity and conductivity Sputtering Sputter deposition Substrate (aquarium) Optoelectronics Layer (electronics) Analytical Chemistry (journal) Deposition (geology) Composite material Nanotechnology Chemistry

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

GaN-based semiconductor devices and materials

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

ZnO films deposited on GaAs substrates with a SiO2 thin buffer layer

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