ZnO thin films synthesized by chemical vapor deposition

Abstract

This paper describes the experimental results of our recent attempt to synthesize device quality ZnO thin films on silicon and sapphire substrates by means of chemical vapor deposition. The surface features and crystal quality of these films are studied by scanning electron microscope and optical spectroscopy, respectively. Although it was not successful to deposit crystalline thin film on silicon substrate, high quality thin films on sapphire substrates were synthesized.