A new epitaxial orientation of CoSi2 on (111)Si

JOURNAL ARTICLE

Year: 1992 Journal: Thin Solid Films Vol: 215 (2)Pages: 184-187 Publisher: Elsevier BV

DOI: 10.1016/0040-6090(92)90435-e

Keywords:

Epitaxy Materials science Orientation (vector space) Crystallography Chemistry Nanotechnology Geometry Mathematics

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Semiconductor materials and interfaces

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Silicon and Solar Cell Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering