Correlation between hydrogen thermal evolution and morphology in glow discharge deposited a-Si:H films

C. Roch; J.C. Delgado

doi:10.1016/0040-6090(92)90789-e

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Correlation between hydrogen thermal evolution and morphology in glow discharge deposited a-Si:H films

C. Roch J.C. Delgado

Year: 1992 Journal: Thin Solid Films Vol: 221 (1-2)Pages: 17-20 Publisher: Elsevier BV

DOI: 10.1016/0040-6090(92)90789-e

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Keywords:

Annealing (glass) Amorphous solid Analytical Chemistry (journal) Hydrogen Scanning electron microscope Glow discharge Silane Materials science Morphology (biology) Thermal decomposition Silicon Thin film Chemistry Plasma Crystallography Nanotechnology Composite material Metallurgy

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Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Silicon and Solar Cell Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Correlation between hydrogen thermal evolution and morphology in glow discharge deposited a-Si:H films

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