Tracer Self- Diffusion Studies in Amorphous Si-(B)-C-N Ceramics Using Ion Implantation and SIMS

Harald Schmidt; Günter Borchardt; H. Baumann; Serge Weber; S. Scherrer; A. Müller; Joachim Bill

doi:10.4028/www.scientific.net/ddf.194-199.941

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Tracer Self- Diffusion Studies in Amorphous Si-(B)-C-N Ceramics Using Ion Implantation and SIMS

Harald Schmidt Günter Borchardt H. Baumann Serge Weber S. Scherrer A. Müller Joachim Bill

Year: 2001 Journal: Defect and diffusion forum/Diffusion and defect data, solid state data. Part A, Defect and diffusion forum Vol: 194-199 Pages: 941-946 Publisher: Trans Tech Publications

DOI: 10.4028/www.scientific.net/ddf.194-199.941

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Keywords:

TRACER Ion implantation Amorphous solid Diffusion Materials science Ion Secondary ion mass spectrometry Ceramic Analytical Chemistry (journal) Radiochemistry Chemistry Crystallography Metallurgy Nuclear physics Physics Chromatography Thermodynamics

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Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced ceramic materials synthesis

Physical Sciences → Materials Science → Ceramics and Composites

Ion-surface interactions and analysis

Physical Sciences → Engineering → Computational Mechanics

Tracer Self- Diffusion Studies in Amorphous Si-(B)-C-N Ceramics Using Ion Implantation and SIMS

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