Electrical properties of d.c. sputtered InAs thin films

Kaushal Jha; A.V Korgaonkar

doi:10.1016/0040-6090(72)90336-7

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Electrical properties of d.c. sputtered InAs thin films

Kaushal Jha A.V Korgaonkar

Year: 1972 Journal: Thin Solid Films Vol: 9 (1)Pages: 133-138 Publisher: Elsevier BV

DOI: 10.1016/0040-6090(72)90336-7

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Keywords:

Sputtering Deposition (geology) Impurity Evaporation Materials science Thin film Vacuum evaporation Hall effect Electrical resistivity and conductivity Vacuum deposition Analytical Chemistry (journal) Chemistry Nanotechnology Thermodynamics Geology Electrical engineering Physics

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Advanced Semiconductor Detectors and Materials

Physical Sciences → Engineering → Electrical and Electronic Engineering

Chalcogenide Semiconductor Thin Films

Physical Sciences → Engineering → Electrical and Electronic Engineering

Semiconductor Quantum Structures and Devices

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Electrical properties of d.c. sputtered InAs thin films

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