JOURNAL ARTICLE
Optical properties of d.c. reactively sputtered thin films
Year: 1984 Journal: Thin Solid Films Vol: 120 (2)Pages: 81-108 Publisher: Elsevier BV
Keywords:
Materials science Refractive index Aluminium Sputtering Thin film Deposition (geology) Silicon Titanium Dielectric Sputter deposition Cathode Analytical Chemistry (journal) Composite material Metallurgy Optoelectronics Nanotechnology Chemistry
Metrics
38
Cited By
1.44
FWCI (Field Weighted Citation Impact)
53
Refs
0.82
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Thin-Film Transistor Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Chemical and Physical Properties of Materials
Physical Sciences → Materials Science → Materials Chemistry
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