Optical and electrical properties of reactively d.c. magnetron-sputtered In2O3:Sn films

Albert Theuwissen; G. Declerck

doi:10.1016/0040-6090(84)90232-3

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Optical and electrical properties of reactively d.c. magnetron-sputtered In2O3:Sn films

Albert Theuwissen G. Declerck

Year: 1984 Journal: Thin Solid Films Vol: 121 (2)Pages: 109-119 Publisher: Elsevier BV

DOI: 10.1016/0040-6090(84)90232-3

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Keywords:

Materials science Transparent conducting film Electrical conductor Optoelectronics Sputter deposition Cavity magnetron Electrical resistivity and conductivity Indium tin oxide Deposition (geology) Indium Sputtering Thin film Alloy Tin Metallurgy Composite material Nanotechnology Electrical engineering

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Topics

ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Transition Metal Oxide Nanomaterials

Physical Sciences → Materials Science → Polymers and Plastics

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