Study on the Hydrogenated Diamond-Like Carbon Films Synthesized by RF-PECVD from n-decane

Feisal Kroushawi; Hamid Latifi; Seyed Iman Hosseini; Marzieh Abbasi-Firouzjah; Babak Shokri

doi:10.1007/s10894-012-9512-x

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Study on the Hydrogenated Diamond-Like Carbon Films Synthesized by RF-PECVD from n-decane

Feisal Kroushawi Hamid Latifi Seyed Iman Hosseini Marzieh Abbasi-Firouzjah Babak Shokri

Year: 2012 Journal: Journal of Fusion Energy Vol: 31 (6)Pages: 581-585 Publisher: Springer Science+Business Media

DOI: 10.1007/s10894-012-9512-x

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Keywords:

Plasma-enhanced chemical vapor deposition Raman spectroscopy Materials science Hydrogen Carbon film Chemical vapor deposition Photoluminescence Analytical Chemistry (journal) Carbon fibers Thin film Diamond-like carbon Deposition (geology) Ellipsometry Diamond Nanotechnology Chemistry Optics Optoelectronics Composite material Organic chemistry

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Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Carbon Nanotubes in Composites

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Study on the Hydrogenated Diamond-Like Carbon Films Synthesized by RF-PECVD from n-decane

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