Crystallization of sol-gel deposited potassium-tantalate-niobate thin films on platinum

Abstract

Potassium tantalate niobate (KTN) ferroelectric thin films prepared by sol-gel processing have been heat treated in conventional furnaces and through rapid thermal annealing (RTA) to investigate crystallization of the films. Various key factors such as time and temperature influencing the crystallization have been identified. A post-deposition RTA at 750 °C in nitrogen for 5 min crystallized the KTN films into pure perovskite while it took two hours to completely crystallize a similar KTN film in conventional ovens. The effect of preheat treatment at lower temperatures, solution chemistry, and the thickness have also been studied. Preliminary ferroelectric properties of some samples are also presented.