Effects of Sol–Gel Processing Parameters and Substrates on Crystallization of Potassium Tantalate–Niobate Thin Films

Abstract

Potassium tantalate–niobate thin films were prepared from metal-organic compounds by sol–gel processing. Effects of substrates and processing parameters on K(Ta, Nb)O3 thin film growth were studied. The results showed that perovskite phase of K(Ta, Nb)O3 was formed through the reactions of pyrochlore phases, and K(Ta, Nb)O3 thin films with pure perovskite phase can be obtained. The formation mechanism of the perovskite phase of K(Ta, Nb)O3 on SrTiO3 and MgO single crystal substrates was discussed, and the causes that K(Ta, Nb)O3 thin films with pure perovskite structure on single crystal silicon and quartz glass substrates cannot be obtained was detailed.