Properties of transparent yttrium oxide dielectric films prepared by sol–gel process

Chien‐Yie Tsay; Chia-Hsiang Cheng; Yu‐Wu Wang

doi:10.1016/j.ceramint.2011.09.060

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Properties of transparent yttrium oxide dielectric films prepared by sol–gel process

Chien‐Yie Tsay Chia-Hsiang Cheng Yu‐Wu Wang

Year: 2011 Journal: Ceramics International Vol: 38 (2)Pages: 1677-1682 Publisher: Elsevier BV

DOI: 10.1016/j.ceramint.2011.09.060

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Keywords:

Materials science Crystallite Dielectric Annealing (glass) Yttrium Sol-gel Oxide Composite material Analytical Chemistry (journal) Thin film Optoelectronics Nanotechnology Metallurgy

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Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Properties of transparent yttrium oxide dielectric films prepared by sol–gel process

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