The Dielectric Properties for Yttrium Doped SBT Thin Films Prepared by Sol-Gel Method
Lianwei ShanWei LiHuanyan XuZhidong HanZe WuLimin DongXinghua FuWenping Hou
Abstract
In this work, Sr0.5Ba0.5Ti1-zYzO3 (SBT) thin films were prepared on a Pt/SiO2/Si substrate by sol-gel process. The microstructures of SBT thin films were examined by IR, XRD and TEM. The influences of Y on the microstructure and dielectric properties of Sr0.5Ba0.5Ti1-zYzO3 thin films were studied. It is found that tetragonal perovskite crystal grains existed in SBT thin films. Increasing Y doping has a clear effect on the grain size of SBT. It is found that the proper Y doping content decreases dielectric loss for SBT thin films.
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