Properties of amorphous ZrO thin films deposited by filtered cathodic vacuum arc

Daniel H. C. Chua; WI Milne; Zhiwei Zhao; Beng Kang Tay; Shu Ping Lau; T.J. Carney; R.G. White

doi:10.1016/j.jnoncrysol.2003.09.016

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Properties of amorphous ZrO thin films deposited by filtered cathodic vacuum arc

Daniel H. C. Chua WI Milne Zhiwei Zhao Beng Kang Tay Shu Ping Lau T.J. Carney R.G. White

Year: 2003 Journal: Journal of Non-Crystalline Solids Vol: 332 (1-3)Pages: 185-189 Publisher: Elsevier BV

DOI: 10.1016/j.jnoncrysol.2003.09.016

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Keywords:

Amorphous solid Vacuum arc X-ray photoelectron spectroscopy Materials science Thin film Microstructure Analytical Chemistry (journal) Zirconium Vacuum deposition Composite material Metallurgy Crystallography Chemical engineering Chemistry Nanotechnology

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Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Electronic and Structural Properties of Oxides

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Properties of amorphous ZrO thin films deposited by filtered cathodic vacuum arc

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