JOURNAL ARTICLE

Mechanisms of suboxide growth and etching in atomic layer deposition of tantalum oxide from TaCl5 and H2O

Jaan AarikKaupo KukliAleks AidlaL. Pung

Year: 1996 Journal:   Applied Surface Science Vol: 103 (4)Pages: 331-341   Publisher: Elsevier BV
Keywords:
Suboxide Tantalum Atomic layer deposition Etching (microfabrication) Layer (electronics) Analytical Chemistry (journal) Oxide Deposition (geology) Materials science Thin film Tantalum nitride Chemistry Nanotechnology Metallurgy

Metrics

55
Cited By
1.85
FWCI (Field Weighted Citation Impact)
28
Refs
0.87
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Gas Sensing Nanomaterials and Sensors
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering
Electronic and Structural Properties of Oxides
Physical Sciences →  Materials Science →  Materials Chemistry
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