Machining High Aspect Ratio Features with Single Femtosecond Laser Pulses

Brian K. Canfield; Trevor Bowman; Lino Costa; Deepak Rajput; Alexander Terekhov; William Hofmeister; Lloyd M. Davis

doi:10.1364/fio.2014.fth4g.4

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Machining High Aspect Ratio Features with Single Femtosecond Laser Pulses

Brian K. Canfield Trevor Bowman Lino Costa Deepak Rajput Alexander Terekhov William Hofmeister Lloyd M. Davis

Year: 2014 Pages: FTh4G.4-FTh4G.4

DOI: 10.1364/fio.2014.fth4g.4

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Abstract

Exceptionally deep submicron-diameter holes and long microchannels are machined in fused silica by single femtosecond pulses using spherical, cylindrical, and aspheric lenses. These features result from a combination of longitudinal spherical aberration and filamentation.

Keywords:

Filamentation Femtosecond Materials science Optics Laser Spherical aberration Laser beam machining Machining Aspect ratio (aeronautics) Optoelectronics Laser beams Lens (geology) Physics

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Optical Coherence Tomography Applications

Physical Sciences → Engineering → Biomedical Engineering

Machining High Aspect Ratio Features with Single Femtosecond Laser Pulses

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