Spatially Chirped Pulses for High Aspect Ratio Micromachining by Femtosecond Laser Ablation

Dawn Vitek; Daniel E. Adams; Adrea Johnson; David Kleinfeld; Sterling Backus; Charles G. Durfee; Jeff Squier

doi:10.1364/cleo.2010.cmbb5

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Spatially Chirped Pulses for High Aspect Ratio Micromachining by Femtosecond Laser Ablation

Dawn Vitek Daniel E. Adams Adrea Johnson David Kleinfeld Sterling Backus Charles G. Durfee Jeff Squier

Year: 2010 Vol: 26 Pages: CMBB5-CMBB5

DOI: 10.1364/cleo.2010.cmbb5

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Abstract

We demonstrate that spatially chirped femtosecond laser pulses overcome previous limitations for the machining of high-aspect ratio features with low numerical aperture beams in optically transparent materials.

Keywords:

Femtosecond Surface micromachining Materials science Laser Optics Laser ablation Machining Ablation Laser beam machining X-ray laser Optoelectronics Aspect ratio (aeronautics) Laser beams Laser power scaling Fabrication Physics Engineering

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Advanced Fiber Laser Technologies

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Ocular and Laser Science Research

Health Sciences → Medicine → Ophthalmology

Spatially Chirped Pulses for High Aspect Ratio Micromachining by Femtosecond Laser Ablation

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