JOURNAL ARTICLE
Nanocomposite Ti–Si–N films deposited by reactive unbalanced magnetron sputtering at room temperature
Ning JiangY.G. ShenYiu‐Wing MaiTai L. ChanSimon C. Tung
Year: 2003 Journal: Materials Science and Engineering B Vol: 106 (2)Pages: 163-171 Publisher: Elsevier BV
Keywords:
Materials science Nanoindentation Microstructure X-ray photoelectron spectroscopy Auger electron spectroscopy Sputter deposition Scanning electron microscope Nanocrystalline material Sputtering Titanium nitride Amorphous solid Surface roughness Silicon nitride Analytical Chemistry (journal) Silicon Composite material Thin film Nitride Crystallography Nanotechnology Metallurgy Chemical engineering Layer (electronics) Chemistry
Metrics
99
Cited By
11.79
FWCI (Field Weighted Citation Impact)
32
Refs
0.99
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
Diamond and Carbon-based Materials Research
Physical Sciences → Materials Science → Materials Chemistry
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Related Documents
JOURNAL ARTICLE
Superhard nanocomposite Ti–Al–Si–N films deposited by reactive unbalanced magnetron sputtering
Ning JiangY.G. ShenH.J. ZhangSheng BaoX. Y. Hou
Journal: Materials Science and Engineering B Year: 2006 Vol: 135 (1)Pages: 1-9
BOOK-CHAPTER
Tribological characteristics of Ti-Si-N films deposited by unbalanced DC magnetron sputtering
Simon C. TungNing JiangY.G. ShenK.Y. LiYiu‐Wing MaiTai L. Chan
Tribology series Year: 2003 Pages: 673-687
JOURNAL ARTICLE
Properties of Ti-Si-N Nanocomposite Coatings Deposited by Closed-Field Unbalanced Magnetron Sputtering
C. H. ZhangXinchun LuJianbin LuoY.G. ShenK.Y. Li
Journal: World Tribology Congress III, Volume 2 Year: 2005 Pages: 323-324
JOURNAL ARTICLE
Microstructure and mechanical properties of Ti–B–C–N–Si nanocomposite films deposited by unbalanced magnetron sputtering
Jaeho JangEunsol AnIn‐Wook ParkDae-Geun NamIlguk JoJianliang LinJohn J. MooreKwang Ho KimIkmin Park
Journal: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Year: 2013 Vol: 31 (6)
JOURNAL ARTICLE
Oxidation and Tribological Behavior of Ti–B–C–N–Si Nanocomposite Films Deposited by Pulsed Unbalanced Magnetron Sputtering
Jaeho JangSung-Bo HeoWang Ryeol KimJun‐Ho KimDae-Geun NamKwang Ho KimIkmin ParkIn‐Wook Park
Journal: Journal of Nanoscience and Nanotechnology Year: 2017 Vol: 18 (3)Pages: 2100-2103