Polycrystalline silicon films fabricated by rapid thermal annealing

Lei Zhang; Honglie Shen; Jiayi You; Feng Jiang; Tianru Wu; Zhengxia Tang

doi:10.1007/s10854-012-0786-6

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Polycrystalline silicon films fabricated by rapid thermal annealing

Lei Zhang Honglie Shen Jiayi You Feng Jiang Tianru Wu Zhengxia Tang

Year: 2012 Journal: Journal of Materials Science Materials in Electronics Vol: 23 (7)Pages: 1279-1283 Publisher: Springer Science+Business Media

DOI: 10.1007/s10854-012-0786-6

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Keywords:

Crystallinity Raman spectroscopy Materials science Amorphous solid Polycrystalline silicon Annealing (glass) Silicon Crystallite Chemical vapor deposition Scanning electron microscope Thin film Chemical engineering Analytical Chemistry (journal) Composite material Layer (electronics) Nanotechnology Crystallography Optoelectronics Optics Chemistry Metallurgy Thin-film transistor

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Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Nanowire Synthesis and Applications

Physical Sciences → Engineering → Biomedical Engineering

Polycrystalline silicon films fabricated by rapid thermal annealing

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