Electrical, optical and microstructural properties of transparent conducting GZO thin films deposited by magnetron sputtering

Zhong Zhi You; Gu Jin Hua

doi:10.1016/j.jallcom.2012.03.078

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Electrical, optical and microstructural properties of transparent conducting GZO thin films deposited by magnetron sputtering

Zhong Zhi You Gu Jin Hua

Year: 2012 Journal: Journal of Alloys and Compounds Vol: 530 Pages: 11-17 Publisher: Elsevier BV

DOI: 10.1016/j.jallcom.2012.03.078

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Keywords:

Materials science Wurtzite crystal structure Sputter deposition Thin film Figure of merit Substrate (aquarium) Crystallite Dielectric Band gap Sputtering Crystal (programming language) Refractive index Optoelectronics Nanotechnology Metallurgy Zinc

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Electrical, optical and microstructural properties of transparent conducting GZO thin films deposited by magnetron sputtering

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