Ordered nanostructures array fabricated by nanosphere lithography

Yongjun Zhang; Xianghe Wang; Yaxin Wang; Huilian Liu; Jinghai Yang

doi:10.1016/j.jallcom.2007.11.021

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Ordered nanostructures array fabricated by nanosphere lithography

Yongjun Zhang Xianghe Wang Yaxin Wang Huilian Liu Jinghai Yang

Year: 2007 Journal: Journal of Alloys and Compounds Vol: 452 (2)Pages: 473-477 Publisher: Elsevier BV

DOI: 10.1016/j.jallcom.2007.11.021

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Keywords:

Materials science Nanosphere lithography Etching (microfabrication) Substrate (aquarium) Lithography Nanotechnology Silicon Nanostructure Monolayer Reactive-ion etching Isotropic etching Chemical engineering Particle (ecology) Optoelectronics Layer (electronics) Fabrication

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Photonic Crystals and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Optical Coatings and Gratings

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Plasmonic and Surface Plasmon Research

Physical Sciences → Engineering → Biomedical Engineering

Ordered nanostructures array fabricated by nanosphere lithography

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