JOURNAL ARTICLE

Ordered nanostructures array fabricated by nanosphere lithography

Yongjun ZhangXianghe WangYaxin WangHuilian LiuJinghai Yang

Year: 2007 Journal:   Journal of Alloys and Compounds Vol: 452 (2)Pages: 473-477   Publisher: Elsevier BV
Keywords:
Materials science Nanosphere lithography Etching (microfabrication) Substrate (aquarium) Lithography Nanotechnology Silicon Nanostructure Monolayer Reactive-ion etching Isotropic etching Chemical engineering Particle (ecology) Optoelectronics Layer (electronics) Fabrication

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24
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0.81
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Citation History

Topics

Photonic Crystals and Applications
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Optical Coatings and Gratings
Physical Sciences →  Materials Science →  Surfaces, Coatings and Films
Plasmonic and Surface Plasmon Research
Physical Sciences →  Engineering →  Biomedical Engineering
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