JOURNAL ARTICLE

Magnetic Nanostructures Fabricated through Nanosphere Lithography

Chen‐Chieh YuYirmin YaoShu-Ting ChouY. Liou

Year: 2005 Journal:   Transactions of the Magnetics Society of Japan Vol: 5 (1)Pages: 9-12

Abstract

In this study, we present a method for fabricating magnetic dots array through nanosphere lithography and reactive-ion etching.Through this technique, one can control the magnetic dot size by tuning the etchingtime of nanospheres.As a demonstration, [Co(3A)/Pt(10A)] 15 films and dots were fabricated on Al2O3(0001) with Pt(111) buffer layers at 100•Ž.The measurement of polar magneto-optical Kerr effect showed a perpendicular magnetic anisotropy in both cases and a low squareness in Co/Pt nanodots system.The investigation of magnetic force microscopy showed that Co/Pt nanodots displayed a single domain behavior.

Keywords:
Materials science Nanosphere lithography Nanostructure Lithography Nanotechnology Optoelectronics Fabrication

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Topics

Magnetic properties of thin films
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
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