JOURNAL ARTICLE

Microstructures of diamond films deposited on (100) silicon wafer by microwave plasma-enhanced chemical vapour deposition

Jung Ho JeG. Y. Lee

Year: 1992 Journal:   Journal of Materials Science Vol: 27 (23)Pages: 6324-6330   Publisher: Springer Science+Business Media
Keywords:
Materials science Diamond Chemical vapor deposition Silicon Wafer Crystallinity Substrate (aquarium) Nucleation Chemical engineering Deposition (geology) Microstructure Carbon film Composite material Mineralogy Analytical Chemistry (journal) Thin film Nanotechnology Metallurgy Chemistry

Metrics

12
Cited By
0.66
FWCI (Field Weighted Citation Impact)
6
Refs
0.68
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Advanced materials and composites
Physical Sciences →  Engineering →  Mechanical Engineering
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