Surface Morphology of 3C-SiC Heteroepitaxial Layers Grown by LPCVD on Si Substrates

JOURNAL ARTICLE

Year: 1998 Journal: Materials science forum Vol: 264-268 Pages: 207-210 Publisher: Trans Tech Publications

DOI: 10.4028/www.scientific.net/msf.264-268.207

Keywords:

Materials science Morphology (biology) Chemical vapor deposition Nanotechnology Optoelectronics Epitaxy Engineering physics Layer (electronics)

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