JOURNAL ARTICLE

Surface Morphology of 3C-SiC Heteroepitaxial Layers Grown by LPCVD on Si Substrates

Keywords:
Materials science Morphology (biology) Chemical vapor deposition Nanotechnology Optoelectronics Epitaxy Engineering physics Layer (electronics)

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7
Cited By
0.89
FWCI (Field Weighted Citation Impact)
0
Refs
0.77
Citation Normalized Percentile
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Topics

Silicon Carbide Semiconductor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Copper Interconnects and Reliability
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials

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