Nanotribological behavior of ZnO films prepared by atomic layer deposition

JOURNAL ARTICLE

Year: 2013 Journal: Journal of Physics and Chemistry of Solids Vol: 75 (3)Pages: 334-338 Publisher: Elsevier BV

DOI: 10.1016/j.jpcs.2013.09.016

Keywords:

Materials science Composite material Scratch Annealing (glass) Penetration (warfare) Thin film Layer (electronics) Plasticity Nanotechnology

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering