Silicon nanowire sensor array using top–down CMOS technology

Ajay Agarwal; Kavitha D. Buddharaju; Ieng Kin Lao; Navab Singh; N. Balasubramanian; Dim‐Lee Kwong

doi:10.1016/j.sna.2007.12.019

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Silicon nanowire sensor array using top–down CMOS technology

Ajay Agarwal Kavitha D. Buddharaju Ieng Kin Lao Navab Singh N. Balasubramanian Dim‐Lee Kwong

Year: 2008 Journal: Sensors and Actuators A Physical Vol: 145-146 Pages: 207-213 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2007.12.019

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Keywords:

Nanowire Temperature coefficient Materials science Fabrication Optoelectronics Detector Silicon Resistance thermometer Nanotechnology CMOS Analyte Fluidics Nano- Temperature measurement Electrical engineering Chemistry Optics Physics

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Nanowire Synthesis and Applications

Physical Sciences → Engineering → Biomedical Engineering

Advancements in Semiconductor Devices and Circuit Design

Physical Sciences → Engineering → Electrical and Electronic Engineering

Analytical Chemistry and Sensors

Physical Sciences → Chemical Engineering → Bioengineering

Silicon nanowire sensor array using top–down CMOS technology

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