Ethyl group decomposition kinetics following adsorption of diethylsilane, diethylgermane, and ethylsilane on Si(111)7 × 7

P. A. Coon; Michael L. Wise; Zane H. Walker; Steven M. George

doi:10.1016/0039-6028(93)90452-p

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Ethyl group decomposition kinetics following adsorption of diethylsilane, diethylgermane, and ethylsilane on Si(111)7 × 7

P. A. Coon Michael L. Wise Zane H. Walker Steven M. George

Year: 1993 Journal: Surface Science Vol: 291 (3)Pages: 337-348 Publisher: Elsevier BV

DOI: 10.1016/0039-6028(93)90452-p

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Keywords:

Chemistry Hydride Adsorption Chemisorption Thermal decomposition Decomposition Hydrogen Kinetics Dangling bond Physical chemistry Desorption Chemical decomposition Inorganic chemistry Photochemistry Organic chemistry

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Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Semiconductor materials and interfaces

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Ethyl group decomposition kinetics following adsorption of diethylsilane, diethylgermane, and ethylsilane on Si(111)7 × 7

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