A multi-frequency light source with a spatial light modulator that generated a broadband spectrum with variable interval and center frequency was demonstrated. It can carry out the arbitrary multi-frequency scan for interferometric profile measurement.
Samuel ChoiMitsufumi YamamotoDaisuke MotekiTatsutoshi ShiodaYosuke TanakaMitsuo TakedaTakashi Kurokawa
Alejandra Serrano-TrujilloMatthew E. Anderson
Kyung‐Il JooChang-Sub ParkMinkyu ParkKyung Woo ParkJi‐Sub ParkYoungmin SeoJoonku HahnHak‐Rin Kim