A Novel Profilometry Using Frequency Comb Light Source

Samuel Choi; Mitsufumi Yamamoto; Daisuke Moteki; Tatsutoshi Shioda; Yosuke Tanaka; Mitsuo Takeda; Takashi Kurokawa

doi:10.1109/cleopr.2005.1569855

ScienceGate Book Chapters

JOURNAL ARTICLE

A Novel Profilometry Using Frequency Comb Light Source

Samuel Choi Mitsufumi Yamamoto Daisuke Moteki Tatsutoshi Shioda Yosuke Tanaka Mitsuo Takeda Takashi Kurokawa

Year: 2006 Pages: 1688-1690

DOI: 10.1109/cleopr.2005.1569855

Get Full-Text PDF Get Analytical Report

Abstract

A novel profilometry using a frequency comb light source is proposed. This method realizes step height measurement without mechanical scanning. We have confirmed the system with high accuracy with this method.

Keywords:

Profilometer Optics Light source Materials science Optical frequency comb Frequency comb Computer science Optoelectronics Physics Surface finish Laser

Metrics

Cited By

0.00

FWCI (Field Weighted Citation Impact)

Refs

0.05

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Topics

Optical Coherence Tomography Applications

Physical Sciences → Engineering → Biomedical Engineering

Advanced Fiber Optic Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Ocular Infections and Treatments

Health Sciences → Medicine → Ophthalmology

A Novel Profilometry Using Frequency Comb Light Source

Abstract

Metrics

Topics

Related Documents

Frequency Comb Profilometry

Multi-frequency light source using spatial light modulator for profilometry

Frequency-Variable Comb Light Source Using an Optical Frequency Shifter

Optical frequency comb interference profilometry using compressive sensing

A new Lidar technology using frequency comb light source