Fabrication and characterization of silicon nanostructures based on metal-assisted chemical etching

Wendong Zhang; Xuge Fan; Shengbo Sang; Pengwei Li; Gang Li; Yongjiao Sun; Jie Hu

doi:10.1007/s11814-013-0180-y

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Fabrication and characterization of silicon nanostructures based on metal-assisted chemical etching

Wendong Zhang Xuge Fan Shengbo Sang Pengwei Li Gang Li Yongjiao Sun Jie Hu

Year: 2013 Journal: Korean Journal of Chemical Engineering Vol: 31 (1)Pages: 62-67 Publisher: Springer Science+Business Media

DOI: 10.1007/s11814-013-0180-y

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Keywords:

Octadecyltrichlorosilane Materials science Contact angle Fabrication Silicon Etching (microfabrication) Wafer Nanotechnology Raman spectroscopy Nanostructure Nanowire Isotropic etching Chemical engineering Optoelectronics Optics Composite material

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Nanowire Synthesis and Applications

Physical Sciences → Engineering → Biomedical Engineering

Advancements in Semiconductor Devices and Circuit Design

Physical Sciences → Engineering → Electrical and Electronic Engineering

Semiconductor materials and interfaces

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Fabrication and characterization of silicon nanostructures based on metal-assisted chemical etching

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