Fabrication of diffraction grating for X-ray Talbot interferometer

Masatake Matsumoto; Kinji Takiguchi; Makoto Tanaka; Yoichi Hunabiki; Hiroaki Takeda; Atsushi Momose; Yuichi Utsumi; Tadashi Hattori

doi:10.1007/s00542-006-0226-8

JOURNAL ARTICLE

Fabrication of diffraction grating for X-ray Talbot interferometer

Masatake Matsumoto Kinji Takiguchi Makoto Tanaka Yoichi Hunabiki Hiroaki Takeda Atsushi Momose Yuichi Utsumi Tadashi Hattori

Year: 2006 Journal: Microsystem Technologies Vol: 13 (5-6)Pages: 543-546 Publisher: Springer Science+Business Media

DOI: 10.1007/s00542-006-0226-8

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Keywords:

Grating Optics Lithography Fabrication Diffraction grating Materials science Diffraction Synchrotron radiation Interferometry Photolithography Optoelectronics Physics

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Advanced X-ray Imaging Techniques

Physical Sciences → Physics and Astronomy → Radiation

Optical measurement and interference techniques

Physical Sciences → Computer Science → Computer Vision and Pattern Recognition

Advanced Measurement and Metrology Techniques

Physical Sciences → Engineering → Mechanical Engineering

Fabrication of diffraction grating for X-ray Talbot interferometer

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