JOURNAL ARTICLE

Fabrication of high precision X-ray mask for X-ray grating of X-ray Talbot interferometer

Daiji NodaHiroshi TsujiiNaoki TakahashiTadashi Hattori

Year: 2010 Journal:   Microsystem Technologies Vol: 16 (8-9)Pages: 1309-1313   Publisher: Springer Science+Business Media
Keywords:
Lithography X-ray X-ray lithography Optics Grating Materials science Interferometry Etching (microfabrication) Fabrication X-ray optics Diffraction Talbot effect Resist Optoelectronics Physics Nanotechnology

Metrics

8
Cited By
1.34
FWCI (Field Weighted Citation Impact)
10
Refs
0.82
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced X-ray Imaging Techniques
Physical Sciences →  Physics and Astronomy →  Radiation
Advancements in Photolithography Techniques
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced Electron Microscopy Techniques and Applications
Life Sciences →  Biochemistry, Genetics and Molecular Biology →  Structural Biology

Related Documents

JOURNAL ARTICLE

Fabrication of X-Ray Gratings Using X-Ray Lithography Technique for X-Ray Talbot Interferometer

Daiji NodaHiroshi TsujiiNaoki TakahashiTadashi Hattori

Journal:   Journal of The Electrochemical Society Year: 2009 Vol: 156 (5)Pages: H299-H299
JOURNAL ARTICLE

X-ray mask fabrication

Journal:   Metal Finishing Year: 2001 Vol: 99 (4)Pages: 102-102
© 2026 ScienceGate Book Chapters — All rights reserved.