Fabrication of high precision X-ray mask for X-ray grating of X-ray Talbot interferometer

Daiji Noda; Hiroshi Tsujii; Naoki Takahashi; Tadashi Hattori

doi:10.1007/s00542-010-1085-x

ScienceGate Book Chapters

JOURNAL ARTICLE

Fabrication of high precision X-ray mask for X-ray grating of X-ray Talbot interferometer

Daiji Noda Hiroshi Tsujii Naoki Takahashi Tadashi Hattori

Year: 2010 Journal: Microsystem Technologies Vol: 16 (8-9)Pages: 1309-1313 Publisher: Springer Science+Business Media

DOI: 10.1007/s00542-010-1085-x

Get Full-Text PDF Get Analytical Report

Keywords:

Lithography X-ray X-ray lithography Optics Grating Materials science Interferometry Etching (microfabrication) Fabrication X-ray optics Diffraction Talbot effect Resist Optoelectronics Physics Nanotechnology

Metrics

Cited By

1.34

FWCI (Field Weighted Citation Impact)

Refs

0.82

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

Advanced X-ray Imaging Techniques

Physical Sciences → Physics and Astronomy → Radiation

Advancements in Photolithography Techniques

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Electron Microscopy Techniques and Applications

Life Sciences → Biochemistry, Genetics and Molecular Biology → Structural Biology

Fabrication of high precision X-ray mask for X-ray grating of X-ray Talbot interferometer

Metrics

Citation History

Topics

Related Documents

Fabrication of diffraction grating for X-ray Talbot interferometer

Flexible X-ray Talbot-Lau grating interferometer

Fabrication of X-Ray Gratings Using X-Ray Lithography Technique for X-Ray Talbot Interferometer

Differential Phase X-ray Imaging Microscopy with X-ray Talbot Interferometer

X-ray mask fabrication