Three dimensional microfabrication by single pulse femtosecond laser through binary phase hologram

Masahiro Yamaji; Hayato Kawashima; Jun‐ichi Suzuki; Shuhei Tanaka

doi:10.1364/nlo.2009.nfb8

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Three dimensional microfabrication by single pulse femtosecond laser through binary phase hologram

Masahiro Yamaji Hayato Kawashima Jun‐ichi Suzuki Shuhei Tanaka

Year: 2009 Pages: NFB8-NFB8

DOI: 10.1364/nlo.2009.nfb8

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Abstract

Multiple elements arrayed in 3D spiral are microfabricated inside silica glass only by single femtosecond laser pulse controlled by computer generated hologram, even if it consist elements of different aspect ratio.

Keywords:

Femtosecond Holography Microfabrication Materials science Binary number Laser Optics Femtosecond pulse shaping Phase (matter) Optoelectronics Physics Fabrication

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Nonlinear Optical Materials Studies

Physical Sciences → Engineering → Biomedical Engineering

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Three dimensional microfabrication by single pulse femtosecond laser through binary phase hologram

Abstract

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