Effect of substrate temperature on microstructure and optical properties of nanocrystalline alumina thin films

G. Balakrishnan; S. Tripura Sundari; R. Ramaseshan; R. Thirumurugesan; E. Mohandas; D. Sastikumar; P. Kuppusami; Tae Gwan Kim; J.I. Song

doi:10.1016/j.ceramint.2013.04.104

JOURNAL ARTICLE

Effect of substrate temperature on microstructure and optical properties of nanocrystalline alumina thin films

G. Balakrishnan S. Tripura Sundari R. Ramaseshan R. Thirumurugesan E. Mohandas D. Sastikumar P. Kuppusami Tae Gwan Kim J.I. Song

Year: 2013 Journal: Ceramics International Vol: 39 (8)Pages: 9017-9023 Publisher: Elsevier BV

DOI: 10.1016/j.ceramint.2013.04.104

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Keywords:

Materials science Nanocrystalline material Nanoindentation Amorphous solid Thin film Substrate (aquarium) Microstructure Transmission electron microscopy Analytical Chemistry (journal) Ellipsometry Crystallite Composite material Crystallography Nanotechnology Metallurgy Chemistry

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Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Effect of substrate temperature on microstructure and optical properties of nanocrystalline alumina thin films

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