Laser Micro-Hole Drilling of Soda-Lime Glass with Femtosecond Pulses

Abstract

Using tightly focused femtosecond laser pulses, we have drilled micro-holes from the front and rear surface of soda-lime glass in ambient air. The machined holes have small aspect ratio or irregular inner walls. When the drilling is conducted from the rear surface in contact with distilled water, a good quality micro-hole with a high aspect ratio can be obtained. The corresponding formation mechanisms are investigated.